Foundations of MEMS (0132497360)

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For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.

Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

Product details

• Format Hardback | 576 pages
• Dimensions 100 x 100 x 100mm | 100g
• Publication date 19 May 2011
• Publisher Pearson Education (US)
• Imprint Pearson
• Publication City/Country Upper Saddle River, NJ, United States
• Language English
• Edition Statement 2nd edition
• ISBN10 0132497360
• ISBN13 9780132497367
• Bestsellers rank 1,497,238

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